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Více informací o knize Amorphous Silicon Carbide for MEMS Applications

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Anotace knihy

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe.

Parametry knihy

Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Technology: general issues Engineering: general

• Plný název: Amorphous Silicon Carbide for MEMS Applications
• Autor: Arnab Choudhury
• Jazyk: Angličtina
• Vazba: Brožovaná
• Počet stran: 180
• EAN: 9783639305272
• ISBN: 3639305272
• ID: 06837491
• Nakladatelství: VDM Verlag
• Hmotnost: 272 g
• Rozměry: 229 × 152 × 10 mm
• Datum vydání: 22. December 2010

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