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Anotace knihy

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Parametry knihy

Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Plný název: CCD Image Sensors in Deep-Ultraviolet
• Podnázev: Degradation Behaviour and Damage Mechanisms
• Autor: F. L. A. Nathon
• Jazyk: Angličtina
• Vazba: Pevná
• Počet stran: 232
• EAN: 9783540226802
• ISBN: 354022680X
• ID: 01559670
• Nakladatelství: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Hmotnost: 508 g
• Rozměry: 240 × 164 × 20 mm
• Datum vydání: 01. March 2005

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